{"id":102,"date":"2025-07-25T09:02:10","date_gmt":"2025-07-25T09:02:10","guid":{"rendered":"https:\/\/cleanproducts.vn\/?p=102"},"modified":"2025-07-25T09:02:10","modified_gmt":"2025-07-25T09:02:10","slug":"cach-quan-ly-phong-sach-trong-quy-trinh-san-xuat-chip","status":"publish","type":"post","link":"https:\/\/cleanproducts.vn\/index.php\/2025\/07\/25\/cach-quan-ly-phong-sach-trong-quy-trinh-san-xuat-chip\/","title":{"rendered":"C\u00e1ch qu\u1ea3n l\u00fd ph\u00f2ng s\u1ea1ch trong quy tr\u00ecnh s\u1ea3n xu\u1ea5t chip"},"content":{"rendered":"

C\u00e1ch qu\u1ea3n l\u00fd ph\u00f2ng s\u1ea1ch trong quy tr\u00ecnh s\u1ea3n xu\u1ea5t chip<\/p>\n

S\u1ea3n xu\u1ea5t chip l\u00e0 m\u1ed9t trong nh\u1eefng l\u0129nh v\u1ef1c c\u00f3 y\u00eau c\u1ea7u m\u00f4i tr\u01b0\u1eddng s\u1ea1ch nghi\u00eam ng\u1eb7t nh\u1ea5t trong ng\u00e0nh c\u00f4ng ngh\u1ec7 hi\u1ec7n nay. Vi\u1ec7c qu\u1ea3n l\u00fd ph\u00f2ng s\u1ea1ch li\u00ean quan tr\u1ef1c ti\u1ebfp \u0111\u1ebfn n\u0103ng su\u1ea5t, hi\u1ec7u su\u1ea5t v\u00e0 \u0111\u1ed9 tin c\u1eady c\u1ee7a chip. Sau \u0111\u00e2y l\u00e0 nh\u1eefng \u0111i\u1ec3m ch\u00ednh c\u1ee7a qu\u1ea3n l\u00fd ph\u00f2ng s\u1ea1ch trong s\u1ea3n xu\u1ea5t chip:<\/p>\n

1. Y\u00eau c\u1ea7u v\u1ec1 c\u1ea5p \u0111\u1ed9 ph\u00f2ng s\u1ea1ch
\nTi\u00eau chu\u1ea9n: Tu\u00e2n th\u1ee7 ti\u00eau chu\u1ea9n ISO 14644-1. S\u1ea3n xu\u1ea5t chip th\u01b0\u1eddng y\u00eau c\u1ea7u ISO 1-3 (t\u1ee9c l\u00e0 s\u1ed1 l\u01b0\u1ee3ng h\u1ea1t \u22650,1\u03bcm tr\u00ean m\u1ed9t m\u00e9t kh\u1ed1i kh\u00f4ng kh\u00ed l\u00e0 \u226410-1.000).<\/p>\n

So s\u00e1nh:<\/p>\n

Ph\u00f2ng ph\u1eabu thu\u1eadt b\u1ec7nh vi\u1ec7n \u0111a khoa \u2248 ISO 7<\/p>\n

Khu v\u1ef1c in th\u1ea1ch b\u1ea3n chip \u2248 ISO 1 (th\u1eadm ch\u00ed m\u1ed9t ph\u1ea7n \u0111\u1ea1t C\u1ea5p \u0111\u1ed9 10, t\u1ee9c l\u00e0 s\u1ed1 l\u01b0\u1ee3ng h\u1ea1t \u22650,1\u03bcm tr\u00ean m\u1ed9t feet kh\u1ed1i l\u00e0 \u226410).<\/p>\n

2. C\u00e1c bi\u1ec7n ph\u00e1p qu\u1ea3n l\u00fd ch\u00ednh
\n(1) Ki\u1ec3m so\u00e1t nh\u00e2n s\u1ef1
\nQuy \u0111\u1ecbnh nghi\u00eam ng\u1eb7t v\u1ec1 ra v\u00e0o:<\/p>\n

Tr\u01b0\u1edbc khi v\u00e0o, c\u1ea7n ph\u1ea3i \u0111i qua bu\u1ed3ng t\u1eafm kh\u00ed \u0111\u1ec3 lo\u1ea1i b\u1ecf c\u00e1c h\u1ea1t tr\u00ean b\u1ec1 m\u1eb7t.<\/p>\n

M\u1eb7c qu\u1ea7n \u00e1o ch\u1ed1ng b\u1ee5i (B\u1ed9 \u0111\u1ed3 th\u1ecf), kh\u1ea9u trang, g\u0103ng tay, gi\u00e0y ch\u1ed1ng t\u0129nh \u0111i\u1ec7n, v\u00e0 m\u1ed9t s\u1ed1 khu v\u1ef1c y\u00eau c\u1ea7u \u0111eo g\u0103ng tay k\u00e9p + kh\u1ea9u trang.<\/p>\n

H\u1ea1n ch\u1ebf v\u1ec1 h\u00e0nh vi:<\/p>\n

C\u1ea5m trang \u0111i\u1ec3m v\u00e0 trang s\u1ee9c (c\u00f3 th\u1ec3 l\u00e0m ph\u00e1t t\u00e1n c\u00e1c h\u1ea1t).<\/p>\n

Di chuy\u1ec3n ch\u1eadm trong qu\u00e1 tr\u00ecnh v\u1eadn h\u00e0nh \u0111\u1ec3 gi\u1ea3m nhi\u1ec5u lo\u1ea1n.<\/p>\n

(2) Qu\u1ea3n l\u00fd thi\u1ebft b\u1ecb
\nCh\u1ed1ng rung v\u00e0 ch\u1ed1ng t\u0129nh \u0111i\u1ec7n:<\/p>\n

L\u1eafp \u0111\u1eb7t thi\u1ebft b\u1ecb H\u1ec7 th\u1ed1ng h\u1ea5p th\u1ee5 s\u1ed1c ch\u1ee7 \u0111\u1ed9ng (nh\u01b0 b\u1ec7 n\u1ed5i kh\u00ed) \u0111\u1ec3 ng\u0103n rung \u0111\u1ed9ng \u1ea3nh h\u01b0\u1edfng \u0111\u1ebfn \u0111\u1ed9 ch\u00ednh x\u00e1c c\u1ee7a quang kh\u1eafc.<\/p>\n

T\u1ea5t c\u1ea3 d\u1ee5ng c\u1ee5 v\u00e0 v\u1eadt mang ph\u1ea3i \u0111\u1ea1t ch\u1ee9ng nh\u1eadn ESD (\u0111i\u1ec7n tr\u1edf b\u1ec1 m\u1eb7t \u2264 10^9\u03a9).<\/p>\n

Thi\u1ebft k\u1ebf t\u1ef1 l\u00e0m s\u1ea1ch:<\/p>\n

S\u1eed d\u1ee5ng v\u1eadt li\u1ec7u th\u00e9p kh\u00f4ng g\u1ec9 ho\u1eb7c Teflon \u0111\u1ec3 gi\u1ea3m s\u1ef1 h\u1ea5p th\u1ee5 h\u1ea1t.<\/p>\n

Thi\u1ebft b\u1ecb \u0111\u01b0\u1ee3c trang b\u1ecb h\u1ec7 th\u1ed1ng d\u00f2ng ch\u1ea3y t\u1ea7ng c\u1ee5c b\u1ed9 (FFU) bao ph\u1ee7 c\u00e1c khu v\u1ef1c ch\u00ednh.<\/p>\n

(3) Ki\u1ec3m so\u00e1t v\u1eadt li\u1ec7u
\nV\u1eadt li\u1ec7u c\u00f3 \u0111\u1ed9 tinh khi\u1ebft c\u1ef1c cao:<\/p>\n

C\u00e1c t\u1ea5m silicon v\u00e0 h\u00f3a ch\u1ea5t (ch\u1ea5t c\u1ea3n quang, dung d\u1ecbch kh\u1eafc) ph\u1ea3i \u0111\u00e1p \u1ee9ng c\u00e1c ti\u00eau chu\u1ea9n SEMI (nh\u01b0 t\u1ea1p ch\u1ea5t kim lo\u1ea1i < 0,1ppb).<\/p>\n

Bao b\u00ec s\u1eed d\u1ee5ng c\u00f4ng ngh\u1ec7 h\u00fat ch\u00e2n kh\u00f4ng + t\u00fai ch\u1ed1ng t\u0129nh \u0111i\u1ec7n, ph\u1ea3i \u0111\u01b0\u1ee3c l\u00e0m s\u1ea1ch s\u01a1 b\u1ed9 trong ph\u00f2ng s\u1ea1ch tr\u01b0\u1edbc khi m\u1edf.<\/p>\n

Quy tr\u00ecnh v\u1eadn chuy\u1ec3n:<\/p>\n

V\u00e0o v\u00e0 ra kh\u1ecfi khu v\u1ef1c s\u1ea1ch th\u00f4ng qua c\u1eeda s\u1ed5 v\u1eadn chuy\u1ec3n hai l\u1edbp (H\u1ed9p chuy\u1ec3n m\u1ea1ch li\u00ean \u0111\u1ed9ng) ho\u1eb7c cabin c\u00e1ch ly vi m\u00f4.<\/p>\n

(4) Ki\u1ec3m so\u00e1t m\u00f4i tr\u01b0\u1eddng
\nH\u1ec7 th\u1ed1ng l\u1ecdc kh\u00f4ng kh\u00ed:<\/p>\n

B\u1ed9 l\u1ecdc HEPA\/ULPA (hi\u1ec7u su\u1ea5t l\u1ecdc c\u00e1c h\u1ea1t 0,1\u03bcm \u226599,9995%).<\/p>\n

S\u1eed d\u1ee5ng d\u00f2ng ch\u1ea3y t\u1ea7ng th\u1eb3ng \u0111\u1ee9ng (D\u00f2ng ch\u1ea3y \u0111\u01a1n h\u01b0\u1edbng), ki\u1ec3m so\u00e1t t\u1ed1c \u0111\u1ed9 gi\u00f3 0,3-0,5m\/s.<\/p>\n

Ch\u00eanh l\u1ec7ch \u00e1p su\u1ea5t, nhi\u1ec7t \u0111\u1ed9 v\u00e0 \u0111\u1ed9 \u1ea9m:<\/p>\n

Ph\u00f2ng s\u1ea1ch duy tr\u00ec \u00e1p su\u1ea5t d\u01b0\u01a1ng +15Pa cho h\u00e0nh lang, v\u00e0 ch\u00eanh l\u1ec7ch \u00e1p su\u1ea5t gradient \u1edf c\u00e1c khu v\u1ef1c kh\u00e1c nhau \u22655Pa.<\/p>\n

Nhi\u1ec7t \u0111\u1ed9 22\u00b10,5\u2103, \u0111\u1ed9 \u1ea9m 45\u00b15% (\u0111\u1ec3 ng\u0103n ng\u1eeba bi\u1ebfn d\u1ea1ng m\u00e0ng c\u1ea3n quang v\u00e0 t\u00edch t\u1ee5 t\u0129nh \u0111i\u1ec7n).<\/p>\n

(5) Gi\u00e1m s\u00e1t v\u00e0 ki\u1ec3m \u0111\u1ecbnh
\nGi\u00e1m s\u00e1t th\u1eddi gian th\u1ef1c:<\/p>\n

M\u00e1y \u0111\u1ebfm h\u1ea1t laser (li\u00ean t\u1ee5c gi\u00e1m s\u00e1t c\u00e1c h\u1ea1t l\u1edbn h\u01a1n 0,1\u03bcm).<\/p>\n

\u0110i\u1ec7n k\u1ebf (\u0111\u1ea3m b\u1ea3o \u0111i\u1ec7n \u00e1p t\u0129nh <\u00b150V).<\/p>\n

Ki\u1ec3m \u0111\u1ecbnh \u0111\u1ecbnh k\u1ef3:<\/p>\n

Ki\u1ec3m tra t\u1ed1c \u0111\u1ed9 gi\u00f3, l\u01b0u l\u01b0\u1ee3ng kh\u00ed v\u00e0 th\u1eddi gian t\u1ef1 l\u00e0m s\u1ea1ch theo ti\u00eau chu\u1ea9n ISO 14644-3.<\/p>\n

L\u1ea5y m\u1eabu vi sinh v\u1eadt tr\u00ean b\u1ec1 m\u1eb7t (\u0111\u1eb7c bi\u1ec7t l\u00e0 khu v\u1ef1c ti\u1ebfp x\u00fac c\u1ee7a wafer).<\/p>\n

3. Qu\u1ea3n l\u00fd c\u00e1c khu v\u1ef1c quy tr\u00ecnh \u0111\u1eb7c bi\u1ec7t
\nKhu v\u1ef1c quy tr\u00ecnh Tr\u1ecdng t\u00e2m qu\u1ea3n l\u00fd
\nKhu v\u1ef1c quang kh\u1eafc M\u00f4i tr\u01b0\u1eddng ISO Class 1 c\u1ee5c b\u1ed9, ki\u1ec3m so\u00e1t rung \u0111\u1ed9ng (bi\u00ean \u0111\u1ed9 <1nm), chi\u1ebfu s\u00e1ng b\u1eb1ng \u0111\u00e8n v\u00e0ng (tr\u00e1nh ti\u1ebfp x\u00fac v\u1edbi ch\u1ea5t c\u1ea3n quang).<\/p>\n

Kh\u1eafc\/l\u1eafng \u0111\u1ecdng X\u1eed l\u00fd kh\u00ed th\u1ea3i (\u0111\u1ec3 ng\u0103n ch\u1eb7n s\u1ef1 khu\u1ebfch t\u00e1n kh\u00ed axit), thi\u1ebft b\u1ecb ph\u1ea3i \u0111\u01b0\u1ee3c trang b\u1ecb b\u1ed9 l\u1ecdc AMC (ch\u1ea5t g\u00e2y \u00f4 nhi\u1ec5m ph\u00e2n t\u1eed kh\u00ed).<\/p>\n

X\u1eed l\u00fd wafer S\u1eed d\u1ee5ng robot ho\u1eb7c xe t\u1ef1 h\u00e0nh (AGV) \u0111\u1ec3 gi\u1ea3m thi\u1ec3u ti\u1ebfp x\u00fac th\u1ee7 c\u00f4ng.<\/p>\n

4. Nh\u1eefng th\u00e1ch th\u1ee9c v\u00e0 gi\u1ea3i ph\u00e1p chung
\nTh\u00e1ch th\u1ee9c 1: \u00d4 nhi\u1ec5m h\u1ea1t nano
\n\u2192 S\u1eed d\u1ee5ng qu\u1ea1t ion h\u00f3a \u0111\u1ec3 trung h\u00f2a h\u1ea5p ph\u1ee5 t\u0129nh \u0111i\u1ec7n v\u00e0 n\u00e2ng c\u1ea5p l\u00ean b\u1ed9 l\u1ecdc ULPA.<\/p>\n

Th\u00e1ch th\u1ee9c 2: H\u01b0 h\u1ecfng do t\u0129nh \u0111i\u1ec7n (ESD)
\n\u2192 N\u1ed1i \u0111\u1ea5t to\u00e0n b\u1ed9 nh\u00e2n vi\u00ean\/thi\u1ebft b\u1ecb v\u00e0 s\u1eed d\u1ee5ng s\u00e0n ch\u1ed1ng t\u0129nh \u0111i\u1ec7n b\u1eb1ng s\u1ee3i carbon.<\/p>\n

Th\u00e1ch th\u1ee9c 3: \u00d4 nhi\u1ec5m ch\u00e9o
\n\u2192 Qu\u1ea3n l\u00fd ph\u00e2n v\u00f9ng nghi\u00eam ng\u1eb7t (ch\u1eb3ng h\u1ea1n nh\u01b0 c\u00e1ch ly v\u1eadt l\u00fd khu v\u1ef1c ch\u1ea5t c\u1ea3n quang v\u00e0 khu v\u1ef1c kh\u1eafc).<\/p>\n

5. Tham chi\u1ebfu ti\u00eau chu\u1ea9n c\u00f4ng nghi\u1ec7p
\nTi\u00eau chu\u1ea9n SEMI (ch\u1eb3ng h\u1ea1n nh\u01b0 th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt ch\u1ed1ng t\u0129nh \u0111i\u1ec7n SEMI F21-1102).<\/p>\n

ITRS (L\u1ed9 tr\u00ecnh C\u00f4ng ngh\u1ec7 Qu\u1ed1c t\u1ebf cho Ch\u1ea5t b\u00e1n d\u1eabn) c\u00f3 c\u00e1c y\u00eau c\u1ea7u h\u01b0\u1edbng t\u1edbi t\u01b0\u01a1ng lai v\u1ec1 \u0111\u1ed9 s\u1ea1ch.<\/p>\n

Ki\u1ec3m so\u00e1t n\u1ed9i b\u1ed9 c\u1ee7a doanh nghi\u1ec7p: C\u00e1c ti\u00eau chu\u1ea9n c\u1ef1c k\u1ef3 nghi\u00eam ng\u1eb7t c\u1ee7a c\u00e1c nh\u00e0 s\u1ea3n xu\u1ea5t nh\u01b0 TSMC v\u00e0 Intel (ch\u1eb3ng h\u1ea1n nh\u01b0 y\u00eau c\u1ea7u v\u1ec1 \u0111\u1ed9 s\u1ea1ch cho quy tr\u00ecnh \u22645nm)<\/p>\n","protected":false},"excerpt":{"rendered":"

C\u00e1ch qu\u1ea3n l\u00fd ph\u00f2ng s\u1ea1ch trong quy tr\u00ecnh s\u1ea3n xu\u1ea5t chip S\u1ea3n xu\u1ea5t chip l\u00e0 m\u1ed9t trong nh\u1eefng l\u0129nh v\u1ef1c c\u00f3 y\u00eau c\u1ea7u m\u00f4i tr\u01b0\u1eddng s\u1ea1ch nghi\u00eam ng\u1eb7t nh\u1ea5t trong ng\u00e0nh c\u00f4ng ngh\u1ec7 hi\u1ec7n nay. Vi\u1ec7c qu\u1ea3n l\u00fd ph\u00f2ng s\u1ea1ch li\u00ean quan tr\u1ef1c ti\u1ebfp \u0111\u1ebfn n\u0103ng su\u1ea5t, hi\u1ec7u su\u1ea5t v\u00e0 \u0111\u1ed9 tin c\u1eady c\u1ee7a chip. […]<\/p>\n","protected":false},"author":1,"featured_media":103,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[1922],"tags":[1923],"class_list":{"0":"post-102","1":"post","2":"type-post","3":"status-publish","4":"format-standard","5":"has-post-thumbnail","6":"hentry","7":"category-cach-quan-ly-phong-sach-trong-quy-trinh-san-xuat-chip","8":"tag-cach-quan-ly-phong-sach-trong-quy-trinh-san-xuat-chip","10":"post-with-thumbnail","11":"post-with-thumbnail-large"},"yoast_head":"\nC\u00e1ch qu\u1ea3n l\u00fd ph\u00f2ng s\u1ea1ch trong quy tr\u00ecnh s\u1ea3n xu\u1ea5t chip - Cleanproducts<\/title>\n<meta name=\"description\" content=\"S\u1ea3n xu\u1ea5t chip l\u00e0 m\u1ed9t trong nh\u1eefng l\u0129nh v\u1ef1c c\u00f3 y\u00eau c\u1ea7u m\u00f4i tr\u01b0\u1eddng s\u1ea1ch nghi\u00eam ng\u1eb7t nh\u1ea5t trong ng\u00e0nh c\u00f4ng ngh\u1ec7 hi\u1ec7n nay. 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